JPS6312533B2 - - Google Patents
Info
- Publication number
- JPS6312533B2 JPS6312533B2 JP16412580A JP16412580A JPS6312533B2 JP S6312533 B2 JPS6312533 B2 JP S6312533B2 JP 16412580 A JP16412580 A JP 16412580A JP 16412580 A JP16412580 A JP 16412580A JP S6312533 B2 JPS6312533 B2 JP S6312533B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- light
- substrate
- measured
- connecting pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C3/00—Vessels not under pressure
- F17C3/02—Vessels not under pressure with provision for thermal insulation
- F17C3/08—Vessels not under pressure with provision for thermal insulation by vacuum spaces, e.g. Dewar flask
- F17C3/085—Cryostats
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/01—Pure fluids
- F17C2221/016—Noble gases (Ar, Kr, Xe)
- F17C2221/017—Helium
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Devices For Use In Laboratory Experiments (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16412580A JPS5788344A (en) | 1980-11-21 | 1980-11-21 | Cryostat |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16412580A JPS5788344A (en) | 1980-11-21 | 1980-11-21 | Cryostat |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5788344A JPS5788344A (en) | 1982-06-02 |
JPS6312533B2 true JPS6312533B2 (en]) | 1988-03-19 |
Family
ID=15787214
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16412580A Granted JPS5788344A (en) | 1980-11-21 | 1980-11-21 | Cryostat |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5788344A (en]) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0481430U (en]) * | 1990-11-27 | 1992-07-15 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5974729U (ja) * | 1982-11-10 | 1984-05-21 | クラリオン株式会社 | 試料測定装置 |
JPS62190844A (ja) * | 1986-02-18 | 1987-08-21 | Fujitsu Ltd | 低温用プロ−バ |
-
1980
- 1980-11-21 JP JP16412580A patent/JPS5788344A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0481430U (en]) * | 1990-11-27 | 1992-07-15 |
Also Published As
Publication number | Publication date |
---|---|
JPS5788344A (en) | 1982-06-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Schneider et al. | Effect of environment upon the melting point of Al2O3 | |
Russell et al. | The growth of CdS in sealed silica capsules | |
TW202246753A (zh) | 一種氮摻雜單晶矽中氮元素的測量方法及系統 | |
Grisard et al. | Thermal Data, Vapor Pressure and Entropy of Chlorine Trifluoride1 | |
JPS6312533B2 (en]) | ||
US4429047A (en) | Method for determining oxygen content in semiconductor material | |
JPS62110127A (ja) | 光加熱処理装置における被加熱処理物温度の測定方法 | |
Roberts | An optical absorption cell for use at low temperatures | |
Mackenzie et al. | Infrared spectroscopy of melts and hygroscopic glasses | |
TWI716090B (zh) | 測定半導體材料中的氧或碳的方法 | |
White | Extra specific heat in cuprous sulfide; specific heat of ferrous oxide | |
JPS6314770B2 (en]) | ||
JPH0424939A (ja) | シリコン結晶の評価方法 | |
Skau | The Purification and Physical Properties of Organic Compounds. II. The Freezing Points of Some of the Thermometer Calibration Standards for Low Temperature of the Bureau International des Etalons Physicochimiques. | |
RU2091740C1 (ru) | Контейнер для хранения проб и способ его изготовления | |
JPH06347398A (ja) | ガス中の水分の定量方法 | |
JPH07151606A (ja) | 基板の温度測定装置 | |
JPS58135939A (ja) | 半導体中の不純物濃度測定方法 | |
TW202326106A (zh) | 測量矽片中氧含量的方法及裝置 | |
Johnston | Photoelectric methods for following fast gas-phase reactions | |
JPH085553A (ja) | GaP単結晶中のSi濃度簡易測定法 | |
Liu et al. | Polysilicon and Its Characterization Methods | |
CN118518527A (zh) | 一种氧化镓单晶高温热物性参数的测量方法 | |
Girard et al. | Investigation of the Behavior of the Co–C Eutectic Fixed Point | |
JPS6042363Y2 (ja) | 光学的飽和温度計 |